Description

ZYGO ZMI-4004 is a high-performance 4-axis VME64x measuring board and an important component of Zygo’s industry-leading displacement measurement interferometer(DMI)product line.As a precision measuring device,ZYGO ZMI-4004 is designed to meet the stringent requirements of semiconductor manufacturing,nanoscale positioning systems,and other ultra precision motion control applications for extremely high precision,high speed,and dynamic accuracy.It works in conjunction with Zygo’s laser source(such as the 7712 laser head)and various interferometers to calculate displacement by processing optical signals.This measuring board can provide extremely high resolution of 0.15 nm and speed tracking capability of up to 2.55 m/s,while also having extremely low data age uncertainty in nanoseconds,ensuring synchronization of all axes.ZYGO ZMI-4004 plays a core role in precision motion platform control,enabling the next generation of lithography tools to achieve significantly improved overlay accuracy and higher production throughput.It is a key enabling technology for achieving nanoscale positioning accuracy and dynamic performance.

ZYGO ZMI-4004

technical specifications

Product model:ZYGO ZMI-4004

Manufacturer:ZYGO Corporation

Product type:4-axis VME64x measuring board

Resolution:0.15 nm(dual path plane mirror interferometer configuration)

Maximum speed:2.55 m/s(dual path plane mirror interferometer configuration)

Data rate:10 MHz

Data age uncertainty:±0.1 nsec(between axes within a single board)

Number of axles per board:4 axles

Electronic format:6U VME64x

Reference input:ST fiber optic or HSSDC electrical signal,20.0 MHz

Measurement input:1 ST fiber per axis,20.0±16.1 MHz

Supply voltage:+5 VDC+0.25V/-0.125V 6A(maximum)

Working temperature:10°C to 50°C

Relative humidity:0%to 90%(non condensing)

Displacement range:±10.6 m

Compliant with standards:UL94V0,CE Mark(EN 55011A,EN 50082-1,EN 61010-1)

Main features and advantages

As an outstanding member of the Zygo precision measurement product family,ZYGO ZMI-4004’s unique features and advantages make it irreplaceable in the fields of ultra precision measurement and motion control.

Ultra high resolution and accuracy:ZYGO ZMI-4004 can provide measurement resolution up to 0.15 nm,which is an industry-leading indicator that ensures unparalleled positioning accuracy even in the most demanding applications.Combined with Zygo’s patented Cyclic Error Correction technology,it can automatically and seamlessly eliminate the inherent nonlinear errors of DMI systems,providing excellent dynamic accuracy,which is crucial for the precision of semiconductor manufacturing.

High speed measurement and high throughput:With its maximum speed tracking capability of 2.55 m/s and data rate of 10 MHz,ZYGO ZMI-4004 can meet the measurement needs of high-speed motion platforms.This makes it perform well in systems that require fast movement and precise stopping,such as in lithography machines,where the throughput of wafer processing can be significantly increased,resulting in a huge improvement in production efficiency.

Multi axis synchronization and low data age uncertainty:ZYGO ZMI-4004 integrates four measurement axes on a single measurement board and achieves extremely low±0.1 ns data age uncertainty between axes.This means that the measurement data of all axes are almost synchronized,which is crucial for precise coordination and synchronous control of complex multi axis motion systems such as gantry systems or stacked platforms,effectively avoiding errors caused by data delays.

VME64x compatibility and system integration:ZYGO ZMI-4004 adopts the standard 6U VME64x card format,making it easy to integrate into existing VME bus systems.The VME64x standard provides high bandwidth and powerful processing capabilities,supporting the expansion of up to 16 measurement boards(64 measurement axes)in one chassis,providing a flexible and scalable solution for large-scale,complex precision measurement systems.

Excellent environmental adaptability:Despite being a precision measuring device,ZYGO ZMI-4004 has been designed for industrial use and can operate stably under a certain range of temperature and humidity conditions.Its robust design and good resistance to electromagnetic interference ensure long-term reliable operation in industrial production environments,reducing reliance on additional environmental controls.

ZYGO ZMI-4004

application area

ZYGO ZMI-4004 plays an indispensable role in various industrial fields that require high precision metrology and motion control,thanks to its excellent nanometer level accuracy,high-speed measurement capability,and multi axis synchronization function.

Semiconductor Manufacturing:This is the core application area of ZYGO ZMI-4004.In lithography machines(including stepper and scanning exposure machines),it is used for ultra precision positioning and dynamic tracking of the wafer stage and mask stage,ensuring that the etching accuracy of the lithography process reaches the nanometer level,directly affecting the manufacturing quality and yield of integrated circuits.It is also widely used in wafer defect detection equipment,thin film deposition equipment,and other semiconductor process equipment.

Precision machining:In ultra precision machine tools and CNC equipment,ZYGO ZMI-4004 is used to monitor the relative displacement of cutting tools and workpieces in real time,achieving nanometer level machining accuracy.This is crucial for manufacturing high-value products such as optical components,precision molds,and aerospace parts.

Nanotechnology and Research:In laboratories in the fields of nanoscience,materials science,and biotechnology,ZYGO ZMI-4004 is used to construct and control various nanopositioning systems,such as atomic force microscopy(AFM),scanning tunneling microscopy(STM),and other experimental platforms that require high-precision motion and measurement.

Metrology and Calibration:ZYGO ZMI-4004 is used in metrology laboratories for the calibration and certification of high-precision measuring equipment,such as repeatability,linearity,and positioning accuracy.It serves as a primary or secondary standard,providing traceability for other measurement tools.

High end optical manufacturing:ZYGO ZMI-4004 is used to control the ultra precision grinding and polishing equipment during the manufacturing process of high-precision optical lenses,mirrors,and free-form surface optical components,ensuring that the surface morphology and dimensional accuracy of the components meet nanometer level requirements.

Related products

The products closely related to ZYGO ZMI-4004 mainly include other measurement boards in the Zygo ZMI series,matching laser heads,various interferometers,and related software.

ZYGO ZMI 7712 Laser Head:This is the most commonly used dual frequency laser source for ZYGO ZMI-4004,providing highly stable laser output for interferometer systems and serving as the foundation for achieving high-precision displacement measurement.

ZYGO ZMI 2400 Measurement Board:This is another measurement board in the Zygo ZMI series,typically providing 2 or more axes,with a resolution slightly lower than ZYGO ZMI-4004,but still capable of meeting various high-precision applications.

ZYGO ZMI 4104 Measurement Board:This is a more advanced measurement board in the ZMI series that may enhance performance or functionality,such as providing faster update rates or stronger data processing capabilities,and can be used as an upgrade or alternative to ZYGO ZMI-4004.

ZYGO ZMI Go!Zygo has launched a more compact and easily integrated DMI measurement electronic module that supports up to 4 measurement channels and provides standard data interfaces such as EtherCAT and SSI.It is a modern alternative to ZYGO ZMI-4004 in certain applications.

ZYGO various interferometers,including linear interferometers,plane mirror interferometers,right angle interferometers,etc.,are used in conjunction with ZYGO ZMI-4004 to measure displacement,angle,or flatness according to different measurement geometries and requirements.

ZYGO measurement software:such as ZMI series dedicated configuration and analysis software,used for parameter setting,data acquisition,real-time display,and post-processing analysis of ZYGO ZMI-4004,providing a complete measurement solution.

ZYGO ZMI reference cable:used to connect ZYGO ZMI-4004 with key communication and signal transmission cables for laser heads and interferometers.

ZYGO ZMI-4004

Installation and maintenance

Preparation before installation:Before installing ZYGO ZMI-4004,detailed planning and preparation must be carried out to ensure optimal system performance and operational safety.Firstly,read the official installation manual and user guide of ZYGO ZMI-4004 in detail to understand all electrical connections,fiber optic cabling,VME bus configuration,and environmental requirements.Ensure that the temperature(10°C to 50°C),humidity(0%to 90%non condensing),and vibration level of the installation environment are within the specified range to avoid affecting precision measurements.To provide a stable and compliant+5VDC power supply for ZYGO ZMI-4004 and ensure good heat dissipation performance of the VME chassis,forced air cooling is usually required.Be careful when connecting optical fibers and cables to avoid excessive bending or damaging the connectors.Before any wiring or module plugging,it is necessary to cut off all relevant power sources and take strict anti-static measures,such as wearing anti-static wristbands,to protect sensitive electronic components.

Maintenance suggestion:Regular preventive maintenance is crucial to ensure the long-term stability of ZYGO ZMI-4004 in providing high-precision measurements.It is recommended to regularly check the firmness of all fiber optic connections and HSSDC cable connections to ensure that they are not loose or contaminated.Keep the interior of the VME chassis installed in ZYGO ZMI-4004 clean,remove dust and debris,especially ensure that the ventilation openings are unobstructed to maintain good heat dissipation conditions and prevent overheating from affecting module performance.Regularly check system logs or software diagnostic information to promptly identify and resolve potential abnormal situations.Although the ZYGO ZMI-4004 itself is a maintenance free precision electronic board,the accompanying laser head and interferometer may require regular checks on the cleanliness of the optical path,laser power,and alignment status.When performing any maintenance operations,please be sure to follow Zygo’s official guidelines and contact professional Zygo technical support for diagnosis and repair if necessary,especially when handling laser equipment,be sure to comply with laser safety regulations.

Product Guarantee

We are well aware of the importance of precision metrology in high-end manufacturing and scientific research fields,and therefore provide rigorous product guarantees for every ZYGO ZMI-4004 measuring board.